Location: A Semiconductor Facility in Pudong, Shanghai, China
Service Provider: Jinan FOOEN Equipment Installation Engineering Co., Ltd.

Industry Background

The integrated circuit (IC) industry imposes extremely stringent requirements on compressed air quality, making it a representative example of a “high standard, zero tolerance” environment. Key specifications for compressed air include: a dew point of -70°C @ 8.5 bar, oil content less than 0.01 mg/m³, and a particle count of no more than 100 pcs/m³ for particles ≥0.1 μm. In addition to air purity, the industry demands exceptional system stability, continuous air supply capability, and highly skilled technical support teams.

Project Background

During the early construction phase of a major IC plant in Pudong, Shanghai, delays in land approval hindered the completion of the on-site bulk gas facility, preventing timely production of CDA (Clean Dry Air) and nitrogen (N₂). The client urgently required an alternative gas supply solution to support operations from commissioning through to full production. Air demand increased progressively with project development, starting from 1,000 Nm³/h and peaking at 15,000 Nm³/h, with strict requirements on both gas quality and supply stability.

Solution

Upon receiving the request, the FOOEN rental team responded swiftly, organizing multiple rounds of technical consultations and ultimately delivering a comprehensive solution featuring phased gas supply, flexible scalability, and system redundancy. From the arrival of the first unit in March 2018 to phased withdrawal after peak demand in November 2019, a maximum of 12 compressor units (10 air compressors and 2 nitrogen compressors) operated concurrently on-site for 16 continuous months. The system ran flawlessly through two summers and one winter, with zero equipment failures, earning strong client recognition.

Core Equipment Configuration

1. CDA Supply System (Clean Dry Air)

• 9 containerized ZT250/275 air-cooled oil-free screw compressors (electric drive)
• 1 diesel-driven air-cooled oil-free screw compressor (standby)
• 10 high-temperature refrigerated dryers + heatless adsorption dryers
• Supply capacity: approx. 16,000 Nm³/h
• Output quality: -73°C dew point @ 8.5 bar, oil-free compressed air

2. Medium-Pressure Nitrogen Booster System

• 1 ZT275-N₂ oil-free nitrogen compressor
• 1 ZT132-N₂ oil-free nitrogen compressor
• Supply capacity: approx. 3,200 Nm³/h @ 8 bar pressure

Solution Highlights

• All-Weather Stable Operation:
  Equipment is fully capable of outdoor use in all weather conditions, resistant to heat, cold, and humidity—ensuring uninterrupted year-round performance.
• Modular Configuration & Redundancy:
  Multiple independent units enable continuous operation. The diesel unit can be rapidly activated as backup. Maintenance or failure of any single unit does not affect overall system stability.
• Efficient Nitrogen Utilization:
  Low-pressure nitrogen is efficiently boosted using dedicated nitrogen compressors to meet process demands, significantly improving resource utilization.
• Ultra-Low Noise Design:
  Containerized units are equipped with soundproofing, keeping noise levels below 60 dB to meet the stringent standards of semiconductor cleanroom environments.

Conclusion

Guided by the philosophy of “Service Excellence, Long-Term Mutual Benefit,” FOOEN successfully supported the commissioning and initial production of a leading IC factory with rapid response, professional solutions, and reliable equipment. This project showcases our capabilities in meeting the demands of high-spec industries and further proves the broad potential of oil-free air compressor rental in advanced manufacturing sectors.